JPH0612801Y2 - 気相表面処理装置 - Google Patents
気相表面処理装置Info
- Publication number
- JPH0612801Y2 JPH0612801Y2 JP15252989U JP15252989U JPH0612801Y2 JP H0612801 Y2 JPH0612801 Y2 JP H0612801Y2 JP 15252989 U JP15252989 U JP 15252989U JP 15252989 U JP15252989 U JP 15252989U JP H0612801 Y2 JPH0612801 Y2 JP H0612801Y2
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- chemical
- supply pipe
- vaporizer
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004381 surface treatment Methods 0.000 title claims description 20
- 239000007788 liquid Substances 0.000 claims description 128
- 239000000126 substance Substances 0.000 claims description 122
- 239000006200 vaporizer Substances 0.000 claims description 31
- 239000012808 vapor phase Substances 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 7
- 230000008016 vaporization Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 32
- 239000012071 phase Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 239000012159 carrier gas Substances 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000010926 purge Methods 0.000 description 4
- 239000003814 drug Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006884 silylation reaction Methods 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Pipeline Systems (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15252989U JPH0612801Y2 (ja) | 1989-12-28 | 1989-12-28 | 気相表面処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15252989U JPH0612801Y2 (ja) | 1989-12-28 | 1989-12-28 | 気相表面処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0390429U JPH0390429U (en]) | 1991-09-13 |
| JPH0612801Y2 true JPH0612801Y2 (ja) | 1994-04-06 |
Family
ID=31698785
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15252989U Expired - Lifetime JPH0612801Y2 (ja) | 1989-12-28 | 1989-12-28 | 気相表面処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612801Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013542591A (ja) * | 2010-09-08 | 2013-11-21 | モレキュラー・インプリンツ・インコーポレーテッド | インプリント・リソフラフィで用いる蒸気供給システム |
-
1989
- 1989-12-28 JP JP15252989U patent/JPH0612801Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0390429U (en]) | 1991-09-13 |
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